Manual Probe Station - 上海帆测科技发展有限公司

Product Images

FTPS-8M 8-inch Manual Probe Station - Overall Appearance

Product Drawings

FTPS-8M 8-inch Manual Probe Station technical parameters diagram

FTPS-8M 8-inch Manual Probe Station - Technical Parameters and Dimensions

Product Overview

The FTPS-8M 8-inch manual probe station is designed for high-precision measurements, suitable for RF and millimeter-wave applications. It enables device characterization and wafer-level testing, while supporting high-power performance, failure analysis, IC and MEMS device testing, as well as PCB and package substrate testing.

The equipment features an ergonomic design for easy operation, meeting various high-precision measurement requirements and providing reliable testing solutions for research and production.

Core Features

High Versatility

Compatible with various testing scenarios, supporting different types of devices and wafer testing to meet diverse needs.

Ergonomic Design

Chuck enables quick movement operation, improving operational convenience and reducing operator fatigue.

Flexible Adaptation

The panel can accommodate up to 6 DC or 4 RF micropositioners, adapting to different testing requirements.

Height Adjustable

Panel height is liftable and continuously adjustable, compatible with testing devices of different heights for flexible operation.

Technical Specifications

Parameter	Specification
Rapid movement range	220 mm X 220mm
Fine movement range	220 x 220mm with micrometer control
Fine movement accuracy	< 2.0µm@4000µm/rev
Flatness	< 10 µm
Theta travel (standard)	±60°
Theta travel (fine)	± 5.0°

Parameter	Specification
Movement range	100 x 60mm
Accuracy	<5µm
Lifting	Manual vertical movement with fine adjustment
Movement	X/Y independent movement with self-locking

Parameter	Specification
Material	Stainless steel
Maximum number of micropositioners	6 DC or 4 RF micropositioners
Panel lifting control	Quick adjustment—contact (0), separation (400µm) and continuous adjustment
Height movement range	Up to 50mm
Height repeatability	<1µm
Probe holder mounting	Both RF and DC micropositioners use magnetic adsorption

Standard Wafer Chuck

Parameter	Specification
Diameter	205 mm
Material	Stainless steel
Surface	Flat with centrally engraved vacuum holes
Supported DUT sizes	4-inch, 6-inch, 8-inch standard wafers
Flatness	≤± 5 µm

Auxiliary Chucks

Parameter	Specification
Quantity	2 units
Position	Integrated into the front-right and rear-right of the main chuck
Dimensions (W x L)	40 x 40 mm
Supported DUT size	Minimum 0.5mm x 0.5mm

Parameter	Specification
Maximum voltage between chuck top and ground	500V DC
Isolation	>2GΩ
Dimensions (W×D×H)	720×600×630.5mm
Weight	Approximately 108KG

Accessories

4K Camera Module

Adjustable Light Source (PWM stepless dimming)

0.7-4.5x Optical Zoom Lens (HDMI compatible)

Digital Height Micrometer

Magnetic Platform with Pillars and Monitor Mounts

Power Supply and Gas Path Control Switches (with indicators)

CHUCK Module (X-axis 220mm, Y-axis 220mm, Z-axis 20mm)

Accessory Suction Table (supports probe clean paper, calibration sheets, die adsorption)